Automation for PECVD
Automation for PECVD
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IPA-FREE TEXTURING IN THE FAST LANE
Wafer Handling Plasma High Throughput (boat loader/ unloader) is designed for the fully automatic loading and unloading of process boats (e.g. graphite boats), which are used within batch-type systems for passivation and anti-reflective coating in c-Si solar cell processing. Thanks to its excellent process flexibility, the WHP HTP 8000 system is not only a perfect solution for un-/loading nitride coating processes, but also for the operation in the production of highly efficient solar cell concepts, such as PERC or PID free solar cells.
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