Doping and Diffusion

InDop

Upload Image

The InDop system applies a thin and homogeneous layer of phosphoric acid on the wafers before the inline diffusion process. Using soft rollers to apply the phosphoric acid, it combines a robust process and low cost of ownership with an extremely gentle wafer transport system for highest mechanical and process yields.

Features and Benefits

  • Ideal line integration with RENA InTex® systems
  • Doping process adapted to the texture
  • Double side coating for optimised P-gettering on both sides
  • Low cost of ownership by using phosphoric acid as precursor
  • Formation of a thin PSG layer, easy to remove
  • Download PDF

    Upload File