Doping and Diffusion

Automation for Disffusion

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WAFER HANDLING DIFFUSION

Forming the p-n junction is one of the key processes for modern high-volume solar cell production facilities. In silicon wafer based solar cell technology, this is achieved by diffusing phosphorus atoms into pre-doped wafers, forming an n-type emitter. Today, our WHD system is the industry standard for automating batch-type tube diffusion furnaces.

Features and Benefits

  • High performance loading and unloading quartz process boats
  • Compatible with all tube diffusion furnaces on the market
  • Modular design that is flexible for many factory situations and requirements
  • Proprietary handling technology that ensures the lowest breakage rate and the highest throughput – up to 8000 wafers / hr
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