Separation

Wafer Seperaton

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A wet ribbon separates the wafers direct out from a pre-cleaning wafer basket. A breakage detection sorts out broken wafers. The integrated distribution allocates the wafers onto four and more lanes.

Features and Benefits

  • Direct separation out of the RENA PreWaClean wafer basket, timesaving and gentle process
  • Wafer separation with water slide system
  • Removal of wafer breakage and thick wafers
  • Equipped for the separation of 156 mm wafers (standard design) Optional: conversion kit for 125 mm wafers
  • Integrated distribution system allocates the wafers onto four lanes Optional: More lanes
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