Testing QCheck

Quality Inspection System

Measuring, checking, sorting – RENA QCheck enables the classification of all wafers and cells. The modular system allows the integration of a variety of measuring systems. The resulting sorter module can be laid out as desired.

Areas of application

  • Modular design for individual configuration with measuring systems: thickness, TTV, bow, resistivity, lifetime, surface inspec- tion, topology and geometry, multicrystallinity and micro crack detection
  • Integration of customer defined measuring systems or industry standard measuring systems
  • Arbitrary number of buffering classification stacks
  • Each stack buffer has a capacity of minimum 300 wafers/quality class
  • high throughput
  • Small footprint
  • User-friendly software interface, e.g. online help function
  • Download PDF
    RENA QCheck.pdf