Texturing

Texturing

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IPA-FREE TEXTURING IN THE FAST LANE

Texturing tuned by BatchTex and monoTEX® minimize the process time and optimize wafer performance at the same time. Efficient and cost cutting cleaning combined with fast texturing provide a highly competitive process. Running RENA’s monoTEX® process on wet bench is essential for high efficiency cells.

Features and Benefits

  • Suitable for IPA free texturing
  • Process guarantee for RENA‘s IPA free monoTEX® process
  • Uniform pyramids
  • > 300 runs and more per bath make up
  • Short process time, standard alkaline texturing time below 6 min
  • Pyramid size can be varied by recipe adaption
  • Data base for event tracking
  • Flexible recipe adaptation
  • Extremely low breakage rate: < 0.01 %
  • Optional etch depth measurement
  • Optional flow box units
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