Trichlorosilane (TCS) Plant

TCS Production Technology Solution

GT Advanced Technologies offers a complete TCS production technology package that uses hydrochlorination technology to improve the efficiency and lower costs of polysilicon production. Producing TCS via hydrochlorination technology reduces capital investment by 10 to 15 percent and lowers annual operating costs by about 15 percent. The basis for this substantial savings is a result of removing the electricity intensive STC converter from the production process.

GT’s TCS production technology solution integrates TCS to GT’s family of SDR chemical vapor deposition (CVD) reactors, enabling manufacturers to lower the cost of production and improve the return on investment.

TCS production technology solution bundled deliverables:

  • Basic engineering package (BEP)
  • Equipment Modular process plant
  • Operating instructions Analytical support
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TCS Production Technology Solution.pdf